MOSFET gate leakage modeling and selection guide for alternative gate dielectrics based on leakage considerations

In this paper, we explore the scaling limits of alternative gate dielectrics based on their direct-tunneling characteristics and gate-leakage requirements for future CMOS technology generations. Important material parameters such as the tunneling effective mass are extracted from the direct-tunneling characteristics of several promising high-κ gate dielectrics for the first time. We also introduce a figure-of-merit for comparing the relative advantages of various gate dielectrics based on the gate-leakage current. Using an accurate direct-tunneling gate-current model and specifications from the International Technology Roadmap for Semiconductors (ITRS), we provide guidelines for the selection of gate dielectrics to satisfy the projected off-state leakage current requirements of future high-performance and low-power technologies.