• DocumentCode
    1223899
  • Title

    Photothermal surface-micromachined actuators

  • Author

    Oliver, Andrew D. ; Vigil, Steven R. ; Gianchandani, Yogesh B.

  • Author_Institution
    Sandia Nat. Labs., Albuquerque, NM, USA
  • Volume
    50
  • Issue
    4
  • fYear
    2003
  • fDate
    4/1/2003 12:00:00 AM
  • Firstpage
    1156
  • Lastpage
    1157
  • Abstract
    We report on the optical actuation of surface micromachines. Optical energy is absorbed by the micromachines and converted to heat, which causes differential thermal expansion between different parts of the device and up to 12 μm of displacement. The polysilicon actuators are homogenous and electrically isolated.
  • Keywords
    microactuators; micromachining; optical isolators; photothermal effects; thermal expansion; Si; electrical isolation; microelectromechanical device; optical actuation; photothermal actuator; polysilicon microactuator; surface micromachining; thermal expansion; Actuators; Isolators; Laboratories; Leg; Microelectromechanical devices; Optical beams; Optical design; Optical devices; Photothermal effects; Thermal expansion;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2003.812505
  • Filename
    1206909
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1223899