Title :
Finite Element Simulation of Two-Dimensional Electromechanical Resonators
Author :
Kagawa, Yukio ; Yamabuchi, Tatsuo
Keywords :
Boundary conditions; Capacitive sensors; Electrostriction; Finite element methods; Frequency; Linear approximation; Permittivity; Resonator filters; Shape; Tensile stress;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1974.29826
