Title :
Excitation of Shear Mode Elastic Waves in Co-Sputtered ZnO Films
Author :
Wasa, Kiyotaka ; Hayakawa, Shigeru ; Hada, Toshio
Keywords :
Aluminum; Anodes; Cathodes; Electrodes; Glass; Optical films; Reproducibility of results; Sputtering; Substrates; Zinc oxide;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1974.29831
