Title :
Fabrication of single-mode polymeric optical waveguides by laser-beam writing
Author :
Yoshimura, R. ; Nakagome, H. ; Tomaru, S. ; Imamura, S.
Author_Institution :
Opto-Electron. Labs., NTT Corp., Ibaraki, Japan
fDate :
12/7/1995 12:00:00 AM
Abstract :
A laser-beam writing system is developed for large-area optical waveguide fabrication. Single-mode embedded channel optical waveguides are successfully fabricated on both 4- and 8-in silicon substrates using deuterated fluoromethacrylate polymers by laser-beam writing in photoresist and dry etching. The propagation loss of the waveguides is as low as 0.1 dB/cm at 1.3 μm
Keywords :
laser beam machining; optical fabrication; optical interconnections; optical polymers; optical waveguides; photoresists; printed circuit manufacture; 1.3 micrometre; 4 in; 8 in; deuterated fluoromethacrylate polymers; large-area optical waveguide fabrication; laser-beam writing; optical interconnections; photoresist; propagation loss; single-mode embedded channel waveguides; single-mode polymeric optical waveguides;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19951515
