Title :
Integrated microwave power sensor
Author :
Dehe, A. ; Krozer, V. ; Fricke, K. ; Klingbeil, H. ; Beilenhoff, K. ; Hartnagel, H.L.
Author_Institution :
Inst. fur Hochfrequenztech., Tech. Hochschule Darmstadt, Germany
fDate :
12/7/1995 12:00:00 AM
Abstract :
A new MMIC compatible sensor that measures RF power transmitted over a 50 Ω coplanar waveguide is presented. The sensor is based on the thermoelectric effect in AlGaAs and GaAs/AlGaAs micromachining technology is used for realisation. A sensitivity of 1.1 V/W has been achieved with a reflection coefficient of 0.1 at 10 GHz, by a first realisation
Keywords :
III-V semiconductors; MMIC; aluminium compounds; gallium arsenide; micromachining; microwave detectors; power measurement; thermoelectric devices; 10 GHz; 50 ohm; GaAs-AlGaAs; MMIC; RF power transmission; coplanar waveguide; integrated microwave power sensor; micromachining technology; reflection coefficient; sensitivity; thermoelectric effect;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19951506
