• DocumentCode
    1225309
  • Title

    Integrated microwave power sensor

  • Author

    Dehe, A. ; Krozer, V. ; Fricke, K. ; Klingbeil, H. ; Beilenhoff, K. ; Hartnagel, H.L.

  • Author_Institution
    Inst. fur Hochfrequenztech., Tech. Hochschule Darmstadt, Germany
  • Volume
    31
  • Issue
    25
  • fYear
    1995
  • fDate
    12/7/1995 12:00:00 AM
  • Firstpage
    2187
  • Lastpage
    2188
  • Abstract
    A new MMIC compatible sensor that measures RF power transmitted over a 50 Ω coplanar waveguide is presented. The sensor is based on the thermoelectric effect in AlGaAs and GaAs/AlGaAs micromachining technology is used for realisation. A sensitivity of 1.1 V/W has been achieved with a reflection coefficient of 0.1 at 10 GHz, by a first realisation
  • Keywords
    III-V semiconductors; MMIC; aluminium compounds; gallium arsenide; micromachining; microwave detectors; power measurement; thermoelectric devices; 10 GHz; 50 ohm; GaAs-AlGaAs; MMIC; RF power transmission; coplanar waveguide; integrated microwave power sensor; micromachining technology; reflection coefficient; sensitivity; thermoelectric effect;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19951506
  • Filename
    481037
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1225309