DocumentCode
1225894
Title
A 2.2-μm-Pitch Single-Transistor Charge-Modulation Pixel in a 0.13-μm CMOS Process
Author
Tournier, Arnaud ; Lu, Guo-Neng ; Roy, François ; Deschamps, Benoit
Author_Institution
Front-End Technol. and Manuf. Group
Volume
54
Issue
10
fYear
2007
Firstpage
2623
Lastpage
2629
Abstract
This paper presents the investigation of a 2.2-mum-pitch single-transistor pixel designed in a 0.13-mum CMOS process. Based on charge-induced potential variation of the floating-body of the transistor, this single pixel device can be operated to perform photodetection, charge integration, signal readout, and reset. The main electrical characteristics of the pixel are evaluated by device modeling and simulations as well as measurements of test chips. With optimization of process and electrical parameters, testing results show a conversion factor of 47 muV/hole, a charge-handling capability of 3500 holes, a temporal noise of four holes, and a dynamic range of 40 dB.
Keywords
CMOS image sensors; optimisation; transistors; CMOS process; charge integration; charge-modulation; optimization; photodetection; signal readout; single-transistor pixel; size 0.13 mum; CMOS image sensors; CMOS process; CMOS technology; Electric variables; Laboratories; Pixel; Research and development; Semiconductor device measurement; Semiconductor device modeling; Testing; CMOS image sensors; Charge modulation; pixel structure;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2007.904247
Filename
4317752
Link To Document