• DocumentCode
    1227189
  • Title

    A hierarchical approach to production control of reentrant semiconductor manufacturing lines

  • Author

    Vargas-Villamil, Felipe D. ; Rivera, Daniel E. ; Kempf, Karl G.

  • Author_Institution
    Programa de Matematicas Aplicadas y Computacion, Inst. Mexicano del Petroleo, Mexico City, Mexico
  • Volume
    11
  • Issue
    4
  • fYear
    2003
  • fDate
    7/1/2003 12:00:00 AM
  • Firstpage
    578
  • Lastpage
    587
  • Abstract
    A three-layer hierarchical approach for inventory control and production optimization of semiconductor reentrant manufacturing lines is developed. At the top layer, the parameters of an aggregated model are obtained online while, at the intermediate layer, production optimization and inventory control via model predictive control are performed. The aim of these two layers is aggregated (or averaged) supervisory control. The bottom layer consists of a distributed control policy which issues discrete-event decisions to track the aggregated targets issued by the optimizer. This layer accomplishes shop-floor control. The algorithm is applied to a discrete-event manufacturing line problem developed by Intel Corporation, which captures the main challenges posed by reentrant manufacturing lines.
  • Keywords
    discrete event systems; hierarchical systems; optimisation; predictive control; production control; semiconductor device manufacture; stock control; discrete-event system; distributed control; hierarchical structure; inventory control; model predictive control; optimization; production control; scheduling; semiconductor fabrication; semiconductor reentrant manufacturing lines; shop-floor control; supervisory control; Chemical technology; Councils; Fabrication; Inventory control; Job shop scheduling; Large-scale systems; Predictive control; Predictive models; Production control; Semiconductor device manufacture;
  • fLanguage
    English
  • Journal_Title
    Control Systems Technology, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1063-6536
  • Type

    jour

  • DOI
    10.1109/TCST.2003.813368
  • Filename
    1208336