Title :
Fabrication of SiO2 microlenses on silicone rubber using a vacuum-ultraviolet F2 laser
Author :
Takao, Hiromitsu ; Okoshi, Masayuki ; Miyagami, Hideyuki ; Inoue, Narumi
Author_Institution :
Dept. of Electr. & Electron. Eng., Nat. Defense Acad., Kanagawa, Japan
Abstract :
SiO2 microlenses are fabricated on a silicone rubber surface. The silicone surface irradiated by an F2 laser beam swells and is modified to SiO2 by means of photochemical reaction. When the surface is irradiated by 6000-12000 shot laser pulses, it becomes smooth and spherical. By altering the number of pulses, it is possible to alter the microlenses´ focal lengths within the range of 120-170 μm.
Keywords :
excimer lasers; fluorine; high-speed optical techniques; laser materials processing; microlenses; optical fabrication; photochemistry; silicon compounds; silicone rubber; F2; SiO2; SiO2 microlens fabrication; focal length; laser pulse irradiation; photochemical reaction; silicone rubber; vacuum-ultraviolet F2 laser; Laser ablation; Laser beams; Lenses; Microoptics; Optical device fabrication; Optical pulses; Photochemistry; Rubber; Scanning electron microscopy; Surface emitting lasers;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2004.837707
