Title :
A differential viscosity detector for use in miniaturized chemical separation systems
Author :
Blom, Marko T. ; Chmela, Emil ; Van Der Heyden, Frank H J ; Oosterbroek, R. Edwin ; Tijssen, Robert ; Elwenspoek, Miko ; van den Berg, Albert
Author_Institution :
MESA Res. Inst., Univ. of Twente, Enschede, Netherlands
Abstract :
We present a micromachined differential viscosity detector suitable for integration into an on-chip hydrodynamic chromatography system. The general design, however, is applicable to any liquid chromatography system that is used for separation of polymers. The micromachined part of the detector consists of a fluidic Wheatstone bridge and a low hydraulic capacitance pressure sensor of which the pressure sensing is based on optical detection of a membrane deflection. The stand-alone sensor shows a resolution in specific viscosity of 3×10-3, in which specific viscosity is defined as the increase in viscosity by a sample, relative to the baseline viscosity of a solvent.
Keywords :
chromatography; microfluidics; micromachining; polymer melts; pressure sensors; viscometers; chemical separation systems; fluidic Wheatstone bridge; hydraulic capacitance pressure sensor; liquid chromatography system; membrane deflection; micromachining; on-chip hydro-dynamic chromatography system; optical detection; polymers separation; viscometer; viscosity detection; Bridge circuits; Capacitance; Capacitive sensors; Chemicals; Detectors; Hydrodynamics; Optical sensors; Polymers; System-on-a-chip; Viscosity;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2004.840452