Title :
On-chip SiGe transmission line measurements and model verification up to 110 GHz
Author :
Zwick, Thomas ; Tretiakov, Youri ; Goren, David
Abstract :
On-chip microstrip transmission lines have been measured on-wafer from below 1 GHz up to 110 GHz. Using different pad de-embedding techniques as well as a technique based on two transmission lines of different length, the characteristic transmission line parameters have been accurately determined. The results are compared against simulation results from an electromagnetic full-wave solution and the parametric IBM model which is available in the technology´s design kit.
Keywords :
Ge-Si alloys; UHF measurement; integrated circuit measurement; microstrip lines; microwave measurement; millimetre wave measurement; semiconductor materials; transmission lines; 1 to 110 GHz; SiGe; characteristic transmission line parameters; electromagnetic full-wave solution; microstrip transmission lines; model verification; on-chip transmission line measurements; on-wafer measurements; pad de-embedding techniques; parametric IBM model; transmission line interconnect; Coplanar transmission lines; Electromagnetic measurements; Electromagnetic modeling; Frequency; Germanium silicon alloys; Microstrip; Millimeter wave technology; Predictive models; Silicon germanium; Transmission line measurements;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2004.842817
