Title :
Electronically tunable multi-line TRL usingan impedance matched multi-BitMEMS phase shifter
Author :
Lakshminarayanan, B. ; Weller, T.
Author_Institution :
Electr. Eng. Dept., Univ. of South Florida, Tampa, FL, USA
Abstract :
An electronically tunable thru-reflect-line (TRL) calibration set that utilizes a 4-b true time delay microelectromechanical systems (MEMS) phase shifter topology, based on impedance-matched slow-wave coplanar waveguide (CPW) sections, is presented. The accuracy of the tunable TRL is close to a conventional multi-line TRL calibration and shows a maximum error bound of 0.12 at 40GHz. Experimental data for a 4.6mm-long tunable delay standard shows 317°/dB phase shift at 50GHz (or 91°/mm) with S11 less than -21dB from 1-50GHz. The MEMS beams on the phase shifter are actuated using high resistance SiCr bias lines with typical actuation voltage around 30-45V.
Keywords :
calibration; coplanar waveguides; impedance matching; micromechanical devices; microwave phase shifters; slow wave structures; 1 to 50 GHz; MEMS beams; electronic calibration; electronically tunable multiline TRL; high resistance SiCr bias lines; impedance matched multibit MEMS phase shifter; impedance-matched slow-wave coplanar waveguide; microelectromechanical systems; multiline TRL calibration; thru-reflect-line calibration set; time delay MEMS phase shifter topology; tunable delay standard; Calibration; Coplanar waveguides; Delay effects; Delay lines; Impedance; Microelectromechanical systems; Micromechanical devices; Phase shifters; Propagation losses; Topology;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2004.842867
