Title :
A 2.2 GHz SAW Delay Line Fabricated by Direct Optical Projection
Author :
Silva, Jose H. ; Slobodnik, Andrew J., Jr. ; Kearns, William J.
fDate :
7/1/1979 12:00:00 AM
Keywords :
Delay lines; Fabrication; Fingers; Frequency; Insertion loss; Lenses; Optical filters; Optical losses; Resists; Surface acoustic waves;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1979.31106