DocumentCode
1228676
Title
Acoustic Microscopy Applied to SAW Dispersion and Film Thickness Measurement
Author
Weglein, R.D.
Volume
27
Issue
2
fYear
1980
fDate
3/1/1980 12:00:00 AM
Firstpage
82
Lastpage
86
Keywords
Acoustic imaging; Acoustic materials; Acoustic measurements; Acoustic pulses; Dispersion; Microscopy; Optical films; Optical imaging; Surface acoustic waves; Thickness measurement;
fLanguage
English
Journal_Title
Sonics and Ultrasonics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9537
Type
jour
DOI
10.1109/T-SU.1980.31152
Filename
1539228
Link To Document