DocumentCode
1229147
Title
ZnO Thin-Film SAW Devices
Author
Yamazaki, Osamu ; Mitsuyu, T. ; Wasa, Kiyotaka
Volume
27
Issue
6
fYear
1980
Firstpage
369
Lastpage
378
Keywords
Crystalline materials; Piezoelectric films; Piezoelectric materials; Stability; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature; Thin film devices; Zinc oxide;
fLanguage
English
Journal_Title
Sonics and Ultrasonics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9537
Type
jour
DOI
10.1109/T-SU.1980.31201
Filename
1539277
Link To Document