Title :
Microwave Gas Breakdown in Tunable Evanescent-Mode Cavity Resonators
Author :
Semnani, Abbas ; Kenle Chen ; Peroulis, Dimitrios
Author_Institution :
Birck Nanotechnol. Center, Purdue Univ., West Lafayette, IN, USA
Abstract :
Microwave gas breakdown in strongly-coupled evanescent-mode cavity resonators in atmospheric pressure and room temperature is investigated both numerically and experimentally. This high- Q resonator is widely tunable by changing the gap between its loading post and top wall. In this letter, we study the effect of different gap spacings on breakdown characteristics of this resonator. Good agreement is observed between measured breakdown powers and ones by plasma simulations for resonators with gaps of 14.8-51.2 μm, working in the 6-8.25 GHz frequency range with input breakdown power in the range of 45-48 dBm.
Keywords :
electric breakdown; microwave resonators; atmospheric pressure; frequency 6 GHz to 8.25 GHz; high-Q resonator; microwave gas breakdown; plasma simulations; strongly-coupled evanescent-mode cavity resonators; temperature 293 K to 298 K; tunable evanescent-mode cavity resonators; Cavity resonators; Discharges (electric); Frequency measurement; Power measurement; Radio frequency; Resonant frequency; Evanescent-mode cavity resonator; gas breakdown; high power; micro-plasma;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2014.2306897
