Title :
A MEMS-Stabilized AC Voltage Reference Source
Author :
Dierikx, Erik F.
Author_Institution :
NMi Van Swinden Laboratorium, Delft
fDate :
4/1/2007 12:00:00 AM
Abstract :
Two electronic circuits are described in which the pull-in voltage of capacitive microelectromechanical system (MEMS) devices is applied as a reference for a stable alternating voltage source at frequencies between 5 kHz and 100 kHz. The first circuit is a simple harmonic oscillator. This low-cost circuit is capable of achieving a stability of better than 10 muV/V over one day. The second circuit shows a concept for a self-adjusting feedback technique. The circuit adjusts itself to operate the MEMS capacitor at its pull-in voltage
Keywords :
harmonic oscillators (circuits); micromechanical devices; reference circuits; voltage regulators; 5 to 100 kHz; AC voltage reference source; MEMS; alternating current voltage; alternating voltage source; capacitive microelectromechanical system; feedback circuits; harmonic oscillator; microelectromechanical devices; pull-in voltage; Capacitors; Circuit stability; Electronic circuits; Frequency; Microelectromechanical systems; Micromechanical devices; Oscillators; Power harmonic filters; Transfer functions; Voltage; Alternating current (ac) voltage; capacitive microelectromechanical system (MEMS); feedback circuits; microelectromechanical devices; p ull-in voltage;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2007.890799
