DocumentCode
1230530
Title
Very large deflection with quadratic voltage dependence of ZnO on Si/sub 3/N/sub 4/ bimorph
Author
Smits, Jan G. ; Choi, Wai-shing
Author_Institution
Dept. of Electr. Eng., Boston Univ., MA, USA
Volume
39
Issue
2
fYear
1992
fDate
3/1/1992 12:00:00 AM
Firstpage
302
Lastpage
304
Abstract
ZnO on Si/sub 3/N/sub 4/ bimorphs have shown large deflections with quadratic dependence on applied voltages. Several effects are suggested that might explain these large deflections. No conclusion on the origin of these large deflections can yet be given.<>
Keywords
II-VI semiconductors; electric sensing devices; micromechanical devices; piezoelectric semiconductors; piezoelectric transducers; tactile sensors; zinc compounds; Si substrate; ZnO-Si/sub 3/N/sub 4/ bimorph; heterogeneous piezoelectric bimorph; large deflections; piezoelectric sensor; quadratic voltage dependence; tactile sensor; Electrodes; Piezoelectric materials; Resists; Silicon; Sputter etching; Sputtering; Structural beams; Tactile sensors; Voltage; Zinc oxide;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/58.139129
Filename
139129
Link To Document