Title :
End-Facet Polishing of Surface Plasmon Waveguides in Lithium Niobate
Author :
Jetté-Charbonneau, Stéphanie ; Lahoud, Nancy ; Charbonneau, Robert ; Mattiussi, Greg ; Berini, Pierre
Author_Institution :
Defence R&D Canada, Ottawa, ON
Abstract :
This paper describes a custom polishing procedure developed to produce high quality end-facets on die having a rather unique cross section. The dies comprise two thin lithium niobate claddings on either side of a thin narrow gold stripe, supported by a silicon substrate. This heterogeneous structure operates as an optical waveguide supporting a long-range surface plasmon-polariton mode, and is fabricated via wafer-bonding and thinning. Optical insertion loss measurements were obtained on a set of diced waveguides before and after end-facet polishing. Polishing reduced the insertion loss of the waveguides by 4.7-9.1 dB, indicating that one as-diced end-facet contributes a scattering loss of 2.35-4.55 dB.
Keywords :
gold; integrated optoelectronics; lithium compounds; optical couplers; optical fabrication; optical interconnections; optical loss measurement; optical materials; optical planar waveguides; polaritons; polishing; surface magnetism; surface plasmons; wafer bonding; Au; LiNbO3; Si; dies fabrication; end-facet polishing procedure; heterogeneous structure; insertion loss reduction; lithium niobate claddings; long-range surface plasmon-polariton mode; loss 2.35 dB to 4.55 dB; optical coupling; optical insertion loss measurements; optical interconnections; optical planar waveguide components; optical surface waves; optical waveguide; scattering loss; silicon substrate; surface plasmon waveguides; thin narrow gold stripe; thinning method; wafer-bonding fabrication; Optical coupling; optical interconnections; optical planar waveguide components; optical surface waves; plasmons;
Journal_Title :
Advanced Packaging, IEEE Transactions on
DOI :
10.1109/TADVP.2008.924236
