DocumentCode
1231474
Title
Integrating nonelectronic components into electronic microsystems
Author
Murari, Bruno
Author_Institution
STMicroelectronics, Milano, Italy
Volume
23
Issue
3
fYear
2003
Firstpage
36
Lastpage
44
Abstract
Microelectromechanical systems will soon usher in a new technological renaissance. Just as ICs brought the pocket calculator, PC, and video games, MEMS will provide a new set of products and markets. The author presents the state of the art, from inertial sensors to microfluidic devices.
Keywords
CMOS integrated circuits; microfluidics; micromechanical devices; microsensors; CMOS; MEMS; electronic microsystems; inertial sensors; microelectromechanical systems; microfluidic devices; nonelectronic components; Actuators; CMOS process; CMOS technology; Consumer electronics; Energy management; Micromachining; Micromechanical devices; Power system management; Radio frequency; Signal processing;
fLanguage
English
Journal_Title
Micro, IEEE
Publisher
ieee
ISSN
0272-1732
Type
jour
DOI
10.1109/MM.2003.1209465
Filename
1209465
Link To Document