Title :
Integrating nonelectronic components into electronic microsystems
Author_Institution :
STMicroelectronics, Milano, Italy
Abstract :
Microelectromechanical systems will soon usher in a new technological renaissance. Just as ICs brought the pocket calculator, PC, and video games, MEMS will provide a new set of products and markets. The author presents the state of the art, from inertial sensors to microfluidic devices.
Keywords :
CMOS integrated circuits; microfluidics; micromechanical devices; microsensors; CMOS; MEMS; electronic microsystems; inertial sensors; microelectromechanical systems; microfluidic devices; nonelectronic components; Actuators; CMOS process; CMOS technology; Consumer electronics; Energy management; Micromachining; Micromechanical devices; Power system management; Radio frequency; Signal processing;
Journal_Title :
Micro, IEEE
DOI :
10.1109/MM.2003.1209465
