Title :
SAW Properties of SiO2/128° Y-X LiNb03Structure Fabricated by Magnetron Sputtering Technique
Author :
Yamanouchi, Kazuhiko ; Hayama, Satoshi
Keywords :
Acoustic waves; Attenuation; Delay; Magnetic properties; Radio frequency; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1984.31461
