DocumentCode
1232735
Title
Complete Characterization of Thin- And Thick-Film Materials Using Wideband Reflection Acoustic Microscopy
Author
Lee, Chin C. ; Tsai, C.S. ; Cheng, Xin
Volume
32
Issue
2
fYear
1985
fDate
3/1/1985 12:00:00 AM
Firstpage
248
Lastpage
258
Keywords
Acoustic materials; Acoustic measurements; Acoustic reflection; Frequency measurement; Microscopy; Optical films; Substrates; Thickness measurement; Velocity measurement; Wideband;
fLanguage
English
Journal_Title
Sonics and Ultrasonics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9537
Type
jour
DOI
10.1109/T-SU.1985.31591
Filename
1539667
Link To Document