Title :
Complete Characterization of Thin- And Thick-Film Materials Using Wideband Reflection Acoustic Microscopy
Author :
Lee, Chin C. ; Tsai, C.S. ; Cheng, Xin
fDate :
3/1/1985 12:00:00 AM
Keywords :
Acoustic materials; Acoustic measurements; Acoustic reflection; Frequency measurement; Microscopy; Optical films; Substrates; Thickness measurement; Velocity measurement; Wideband;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1985.31591