DocumentCode :
1232735
Title :
Complete Characterization of Thin- And Thick-Film Materials Using Wideband Reflection Acoustic Microscopy
Author :
Lee, Chin C. ; Tsai, C.S. ; Cheng, Xin
Volume :
32
Issue :
2
fYear :
1985
fDate :
3/1/1985 12:00:00 AM
Firstpage :
248
Lastpage :
258
Keywords :
Acoustic materials; Acoustic measurements; Acoustic reflection; Frequency measurement; Microscopy; Optical films; Substrates; Thickness measurement; Velocity measurement; Wideband;
fLanguage :
English
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9537
Type :
jour
DOI :
10.1109/T-SU.1985.31591
Filename :
1539667
Link To Document :
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