Title :
Scanning Acoustic Microscopy in Electronics Research
Author :
Miller, Andrew J.
fDate :
3/1/1985 12:00:00 AM
Keywords :
Acoustic devices; Acoustic imaging; Apertures; Electron microscopy; Frequency; Lenses; Scanning electron microscopy; Surface waves; Switches; Transducers;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1985.31598
