DocumentCode
1232819
Title
A finite-mesh technique for laser trimming of thin-film resistors
Author
Shier, John
Author_Institution
VTC Inc., Bloomington, MN, USA
Volume
23
Issue
4
fYear
1988
fDate
8/1/1988 12:00:00 AM
Firstpage
1005
Lastpage
1009
Abstract
A laser trimming technique in which a finite number of links are cut in a regular mesh of identical-valued resistors is described. The method eliminates long-term resistance drift due to slow annealing in the `heat-affected-zone´ adjacent to the laser kerf. It is shown that the precision and resolution can be comparable to those achieved with conventional methods, and that quite wide ranges (up to 4:1) of absolute values can be obtained with small meshes. A computational method for constructing a lookup table of resistor values for different cut patterns is described
Keywords
integrated circuit technology; laser beam machining; thin film circuits; thin film resistors; IC fabrication; computational method; cut patterns; finite-mesh technique; identical-valued resistors; laser trimming; lookup table; thin-film resistors; Aging; Annealing; Laser beam cutting; Operational amplifiers; Resistors; Shape; Table lookup; Temperature; Transistors; Voltage;
fLanguage
English
Journal_Title
Solid-State Circuits, IEEE Journal of
Publisher
ieee
ISSN
0018-9200
Type
jour
DOI
10.1109/4.352
Filename
352
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