Title :
Transient Behavior of Transverse Acoustoelectric Voltage and Nondestructive Characterization of Semiconductor Surfaces
Author :
Davari, B. ; Das, Pankaj K.
Keywords :
Delay lines; Electric fields; Monitoring; Piezoelectric materials; Piezoelectric transducers; Radio frequency; Substrates; Surface acoustic waves; Surface treatment; Voltage;
Journal_Title :
Sonics and Ultrasonics, IEEE Transactions on
DOI :
10.1109/T-SU.1985.31662
