Title :
Nondestructive permittivity measurement of substrates
Author_Institution :
GDK Products, Cazenovia, NY, USA
fDate :
2/1/1996 12:00:00 AM
Abstract :
The complex permittivity, κ´[1-j(tan δ)], of a thin, flat dielectric is calculated from the characteristics of the H011 resonance in a cylindrical cavity, with the specimen inserted on the central transverse plane. Dielectric constants from 1 to 300 have been measured with errors less than 1%. The resolution of the loss tangent measurement is approximately 10 ppm at 12 GHz. No irreversible specimen preparation is required, and its shape and size, if larger than the cavity diameter, are arbitrary
Keywords :
calibration; dielectric loss measurement; error analysis; integrated circuit measurement; integrated circuit testing; measurement errors; microwave integrated circuits; microwave measurement; nondestructive testing; permittivity measurement; substrates; 12 GHz; H011 resonance; central transverse plane; complex permittivity; cylindrical cavity; loss tangent measurement; microwave circuits; nondestructive permittivity measurement; substrates; thin flat dielectric; Dielectric constant; Dielectric loss measurement; Dielectric measurements; Dielectric substrates; Frequency; Loss measurement; Metallization; Microwave circuits; Permittivity measurement; Resonance;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
