DocumentCode :
1233717
Title :
Short-channel single-gate SOI MOSFET model
Author :
Suzuki, Kunihiro ; Pidin, Sergey
Author_Institution :
Fujitsu Labs. Ltd., Atsugi, Japan
Volume :
50
Issue :
5
fYear :
2003
fDate :
5/1/2003 12:00:00 AM
Firstpage :
1297
Lastpage :
1305
Abstract :
The authors derive an analytical model for threshold voltage for fully depleted single-gate silicon-on-insulator (SOI) MOSFETs taking into consideration the two-dimensional effects in both SOI and buried-oxide layers. Their model is valid for both long- and short-channel SOI MOSFETs and demonstrates the dependence of short-channel effects on the device parameters of channel-doping concentration, gate oxide, SOI, and buried-oxide thickness. It reproduces the numerical data for sub-0.1-μm gate-length devices better than previous models.
Keywords :
MOSFET; doping profiles; semiconductor device models; silicon-on-insulator; 0.1 micron; Si; analytical model; buried-oxide layers; buried-oxide thickness; channel-doping concentration; device parameters; short-channel SOI MOSFETs; single-gate SOI MOSFET model; sub-micron gate-length devices; threshold voltage; two-dimensional effects; Analytical models; Boundary conditions; Distribution functions; MOSFET circuits; Medical simulation; Polynomials; Predictive models; Silicon on insulator technology; Threshold voltage; Two dimensional displays;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/TED.2003.813450
Filename :
1210780
Link To Document :
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