• DocumentCode
    1233949
  • Title

    Geometric Effect Elimination and Reliable Trap State Density Extraction in Charge Pumping of Polysilicon Thin-Film Transistors

  • Author

    Lu, Lei ; Wang, Mingxiang ; Wong, Man

  • Author_Institution
    Dept. of Microelectron., Soochow Univ., Suzhou
  • Volume
    30
  • Issue
    5
  • fYear
    2009
  • fDate
    5/1/2009 12:00:00 AM
  • Firstpage
    517
  • Lastpage
    519
  • Abstract
    The charge pumping (CP) technique in polysilicon thin-film transistors (TFTs) is optimized by adjusting the gate pulse transition times to eliminate the geometric component of the CP current. Improved CP curves similar to those in MOSFETs are obtained for polysilicon TFTs. Typical trap state density (D macrt) energy distribution within the upper part of the band gap and the mean Dt value ([(D macr)]t) are reliably extracted in different approaches. Furthermore, based on the traditional CP model, a modified Dt extraction approach, where the influence of the CP geometric component is inherently avoided, is first proposed. Such an extracted [(D macr)]t agrees well with those extracted by two optimized conventional approaches where geometric effect is eliminated.
  • Keywords
    elemental semiconductors; interface states; silicon; thin film transistors; Si; band gap; charge pumping; energy distribution; geometric effect elimination; polysilicon thin-film transistors; reliable trap state density extraction; Charge pumping (CP); geometric effect; polysilicon; thin-film transistors; trap state density;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2009.2017037
  • Filename
    4813213