Title :
High-Coupling and High-Velocity SAW Using ZnO and AlN Films on a Glass Substrate
Author :
Shiosaki, Tadashi ; Mikamura, Yasuki ; Takeda, Fumio ; Kawabata, Akira
fDate :
5/1/1986 12:00:00 AM
Keywords :
Acoustic waves; Ceramics; Glass; Piezoelectric films; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature; Zinc oxide;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/T-UFFC.1986.26836
