DocumentCode

1234019

Title

High-Coupling and High-Velocity SAW Using ZnO and AlN Films on a Glass Substrate

Author

Shiosaki, Tadashi ; Mikamura, Yasuki ; Takeda, Fumio ; Kawabata, Akira

Volume

33

Issue

3

fYear

1986

fDate

5/1/1986 12:00:00 AM

Firstpage

324

Lastpage

330

Keywords

Acoustic waves; Ceramics; Glass; Piezoelectric films; Sputtering; Substrates; Surface acoustic wave devices; Surface acoustic waves; Temperature; Zinc oxide;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/T-UFFC.1986.26836

Filename

1539807