Title :
Transmission-Line Approach for Computation of Static Capacitance of Interdigital Transducers in Multilayered Media
Author :
Panwar, B.S. ; Bhattacharya, A.B. ; Dieulesaint, E.
fDate :
7/1/1986 12:00:00 AM
Keywords :
Acoustic transducers; Admittance; Anisotropic magnetoresistance; Boundary conditions; Capacitance; Electrodes; Equations; Fingers; Silicon; Transmission lines;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/T-UFFC.1986.26850