Title :
The enhanced voltage-dividing potentiometer for high-precision feature placement metrology
Author :
Allen, Richard A. ; Cresswell, M.W. ; Ellenwood, Colleen H. ; Linholm, Loren W.
Author_Institution :
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
fDate :
2/1/1996 12:00:00 AM
Abstract :
Enhancements to the voltage-dividing potentiometer, an electrical test structure for measuring the spatial separations of pairs of conducting features, are presented and discussed. These enhancements reduce or eliminate systematic errors which can otherwise lead to uncertainties as large as several hundred nanometers. These systematic errors, attributed by modeling to asymmetries at certain intersections of conducting features in the test structure, are eliminated by modifications to the test structure and test procedures
Keywords :
feature extraction; integrated circuit measurement; measurement errors; nanotechnology; potentiometers; spatial variables measurement; voltage dividers; asymmetries; electrical test structure; enhanced voltage-dividing potentiometer; feature placement metrology; geometry dependent effects; intersections; modeling; overlay measurement; spatial separations; systematic errors; test structure; uncertainties; Conductive films; Electron optics; Error correction; Metrology; NIST; Optical microscopy; Potentiometers; Scanning electron microscopy; System testing; Voltage;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
