Application of a new Cl-plasma-treated Ag/AgCl reference electrode to micromachined glucose sensor

Author

Park, Se-Ik ; Jun, Sang Beom ; Park, Sejin ; Hee Chan Kim ; Kim, Sung June

Author_Institution

Sch. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., South Korea

Volume

3

Issue

3

fYear

2003

fDate

6/1/2003 12:00:00 AM

Firstpage

267

Lastpage

273

Abstract

Micromachined glucose sensors were fabricated and integrated with the plasma-treated Ag/AgCl reference electrodes for the first time. The surface of the Cl-plasma exposed AgCl layers was of granule-shaped morphology and showed the favorable long-term stability with a 13-mV potential drift after 5 h over a commercial liquid-junction Ag/AgCl reference electrode in phosphate buffered saline. The fabricated devices showed a typical behavior of an amperometric glucose sensor and a successful operation as a three-electrode system. Due to the integrability of the reference electrode and the use of low-temperature steps only, the new micromachined process can allow easy mass production of the device and the monolithic integration of signal processing circuitry in the future.

Keywords

biosensors; electrochemical sensors; microelectrodes; micromachining; microsensors; organic compounds; plasma materials processing; silver; silver compounds; Ag-AgCl; Ag/AgCl reference electrode; Cl; Cl plasma treatment; amperometric sensor; electrochemical biosensor; mass production; microelectrode; micromachined glucose sensor; monolithic integration; potential drift; Amperometric sensors; Electrodes; Mass production; Monolithic integrated circuits; Plasma applications; Plasma stability; Sensor systems; Signal processing; Sugar; Surface morphology;

fLanguage

English

Journal_Title

Sensors Journal, IEEE

Publisher

ieee

ISSN

1530-437X

Type

jour

DOI

10.1109/JSEN.2003.814649

Filename

1211074