Title :
An Ultralinear Stress-Compensated Temperature Sensor
Author :
NAKAZAWA, Mitsuo ; Ballato, Arthur ; Lukaszek, Theodore
fDate :
3/1/1987 12:00:00 AM
Keywords :
Aging; Calibration; Electrodes; Laboratories; Manufacturing; Metrology; Resonant frequency; Temperature distribution; Temperature sensors; Thermal stresses;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/T-UFFC.1987.26942
