DocumentCode

1234965

Title

An Ultralinear Stress-Compensated Temperature Sensor

Author

NAKAZAWA, Mitsuo ; Ballato, Arthur ; Lukaszek, Theodore

Volume

34

Issue

2

fYear

1987

fDate

3/1/1987 12:00:00 AM

Firstpage

270

Lastpage

277

Keywords

Aging; Calibration; Electrodes; Laboratories; Manufacturing; Metrology; Resonant frequency; Temperature distribution; Temperature sensors; Thermal stresses;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/T-UFFC.1987.26942

Filename

1539913