Parasitic capacitance effects of planar resistors

The intrinsic capacitance of a planar resistor in a hybrid circuit is discussed. Basic theory is outlined to model the self-capacitance effect of resistive layers. A perturbation method is derived where the zeroth order accounts for the pure resistive effects and the first-order perturbation deals with the capacitive effects. It is shown that even in the absence of contact electrode capacity, any resistive layer creates a capacitive field in the substrate and the surrounding materials. A model is made to describe these intrinsic capacitance effects, and some numerical results are shown