Sputtered thin-film strain gauges for differential pressure measurement

Author

Nayak, Mithun M. ; Rajanna, K. ; Gunasekaran, N. ; Muthunayagam, A.E. ; Mohan, S. ; Ram, K. Mohan

Author_Institution

Liquid Propulsion Syst. Centre, ISRO, Bangalore, India

Volume

45

Issue

1

fYear

1996

fDate

2/1/1996 12:00:00 AM

Firstpage

335

Lastpage

339

Abstract

A differential pressure transducer with sputtered gold films as strain gauges has been designed and fabricated. The construction details of the sensing element assembly are given. The details of the strain gauge film configuration employed and the thin-film deposition process are also presented. Information on the output characteristics of the differential pressure transducer such as effect of pressure cycles on output, thermal stability, bidirectional calibration results obtained and individual gauge stability is reported

Keywords

calibration; electric sensing devices; pressure measurement; pressure sensors; sputter deposition; sputtered coatings; strain gauges; Au; Au target; H beam configuration; Pd; Pd target; bidirectional calibration; configuration; construction; differential pressure measurement; differential pressure transducer; output characteristics; polymer film; pressure cycles; sputtered thin-film strain gauges; thermal stability; thin-film deposition; Capacitive sensors; Heat transfer; Pressure measurement; Solar energy; Sputtering; Strain measurement; Thermal sensors; Thermal stability; Thermoresistivity; Transducers;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/19.481365

Filename

481365