DocumentCode
1235234
Title
Piezoresistive Force Gauges and Their Uses
Author
Wilener, L.B.
Author_Institution
Endevco Laboratories, Mountain View, Calif.
Issue
1
fYear
1969
fDate
7/1/1969 12:00:00 AM
Firstpage
40
Lastpage
43
Abstract
A sensitive and efficient piezoresistive element is described. It is constructed of p-type silicon mounted on an electro-mechanical substrate, and thus is easy to handle and apply where the measurand can be reduced to a force of about 10 grams. This device, the PIXIE, is linear, low noise, relatively inexpensive, and can stand large overloads.
Keywords
Capacitive sensors; Crystalline materials; Force measurement; Piezoresistance; Semiconductor device noise; Semiconductor materials; Silicon; Strain measurement; Substrates; Transducers;
fLanguage
English
Journal_Title
Industrial Electronics and Control Instrumentation, IEEE Transactions on
Publisher
ieee
ISSN
0018-9421
Type
jour
DOI
10.1109/TIECI.1969.229864
Filename
1701708
Link To Document