Title :
Piezoresistive Force Gauges and Their Uses
Author_Institution :
Endevco Laboratories, Mountain View, Calif.
fDate :
7/1/1969 12:00:00 AM
Abstract :
A sensitive and efficient piezoresistive element is described. It is constructed of p-type silicon mounted on an electro-mechanical substrate, and thus is easy to handle and apply where the measurand can be reduced to a force of about 10 grams. This device, the PIXIE, is linear, low noise, relatively inexpensive, and can stand large overloads.
Keywords :
Capacitive sensors; Crystalline materials; Force measurement; Piezoresistance; Semiconductor device noise; Semiconductor materials; Silicon; Strain measurement; Substrates; Transducers;
Journal_Title :
Industrial Electronics and Control Instrumentation, IEEE Transactions on
DOI :
10.1109/TIECI.1969.229864
