Title :
Integrated niobium thin film air bridges as variable capacitors for superconducting GHz electronic circuits
Author :
Schicke, Matthias ; Schuster, Karl F.
Author_Institution :
Inst. for Radio Astron. in the Millimeter Range, St. Martin d´´Heres, France
fDate :
6/1/2003 12:00:00 AM
Abstract :
Superconducting GHz electronics can be improved by variable tuning circuits. We present a low temperature (<150°C) process for the fabrication of niobium (Nb) thin film air bridges as variable capacitors, which can be integrated in Nb superconducting electronics. These elements can be applied for on-chip adjustment of filters, resonators and tuning circuits. Measurements and calculations of the electrostatic actuation of the bridges will be compared.
Keywords :
capacitors; circuit tuning; electrostatic actuators; niobium; superconducting integrated circuits; superconducting microwave devices; superconducting thin films; 150 degC; Nb; electrostatic actuation; integrated niobium thin film air bridge; low temperature fabrication process; superconducting gigahertz electronic circuit; tuning circuit; variable capacitor; Bridge circuits; Capacitors; Circuit optimization; Electronic circuits; Fabrication; Niobium; Superconducting filters; Superconducting thin films; Temperature; Thin film circuits;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2003.813664
