Integrated niobium thin film air bridges as variable capacitors for superconducting GHz electronic circuits

Author

Schicke, Matthias ; Schuster, Karl F.

Author_Institution

Inst. for Radio Astron. in the Millimeter Range, St. Martin d´´Heres, France

Volume

13

Issue

2

fYear

2003

fDate

6/1/2003 12:00:00 AM

Firstpage

135

Lastpage

137

Abstract

Superconducting GHz electronics can be improved by variable tuning circuits. We present a low temperature (<150°C) process for the fabrication of niobium (Nb) thin film air bridges as variable capacitors, which can be integrated in Nb superconducting electronics. These elements can be applied for on-chip adjustment of filters, resonators and tuning circuits. Measurements and calculations of the electrostatic actuation of the bridges will be compared.

Keywords

capacitors; circuit tuning; electrostatic actuators; niobium; superconducting integrated circuits; superconducting microwave devices; superconducting thin films; 150 degC; Nb; electrostatic actuation; integrated niobium thin film air bridge; low temperature fabrication process; superconducting gigahertz electronic circuit; tuning circuit; variable capacitor; Bridge circuits; Capacitors; Circuit optimization; Electronic circuits; Fabrication; Niobium; Superconducting filters; Superconducting thin films; Temperature; Thin film circuits;

fLanguage

English

Journal_Title

Applied Superconductivity, IEEE Transactions on

Publisher

ieee

ISSN

1051-8223

Type

jour

DOI

10.1109/TASC.2003.813664

Filename

1211560