• DocumentCode
    1237380
  • Title

    Fast switching bistable electromagnetic microactuator

  • Author

    Zhang, Y.-H. ; Ding, G.-F. ; Dai, X.-H. ; Cai, B.-C.

  • Author_Institution
    Inst. of Micro & Nano Sci. & Technol., Shanghai Jiaotong Univ., China
  • Volume
    41
  • Issue
    23
  • fYear
    2005
  • Firstpage
    1276
  • Lastpage
    1278
  • Abstract
    A fast switching electromagnetic microactuator with two stable positions is presented. The actuator of size 2.0×2.2 mm is fabricated using UV-LIGA technology. Test results show that a current pulse with an amplitude of 50 mA is needed for the actuator´s switching between two stable states, and the switching time is approximately 20 μs. The displacement of the actuator is about 17 μm.
  • Keywords
    LIGA; electromagnetic actuators; microactuators; stability; ultraviolet lithography; 5 mA; UV-LIGA technology; fast switching electromagnetic microactuator; microactuator bistability; ultraviolet lithography;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20052703
  • Filename
    1541769
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1237380