Title :
Fast switching bistable electromagnetic microactuator
Author :
Zhang, Y.-H. ; Ding, G.-F. ; Dai, X.-H. ; Cai, B.-C.
Author_Institution :
Inst. of Micro & Nano Sci. & Technol., Shanghai Jiaotong Univ., China
Abstract :
A fast switching electromagnetic microactuator with two stable positions is presented. The actuator of size 2.0×2.2 mm is fabricated using UV-LIGA technology. Test results show that a current pulse with an amplitude of 50 mA is needed for the actuator´s switching between two stable states, and the switching time is approximately 20 μs. The displacement of the actuator is about 17 μm.
Keywords :
LIGA; electromagnetic actuators; microactuators; stability; ultraviolet lithography; 5 mA; UV-LIGA technology; fast switching electromagnetic microactuator; microactuator bistability; ultraviolet lithography;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20052703
