Title :
YBa2Cu3OX submicron Josephson junctions on bicrystal substrates
Author :
Volkov, Ivan A. ; Chuharkin, Maxim L. ; Snigirev, Oleg V. ; Ranchinski, Michail L.
Author_Institution :
Phys. Dept., Moscow State Univ., Russia
fDate :
6/1/2003 12:00:00 AM
Abstract :
A technological process based on e-beam lithography and ion beam etching of YBa2Cu3OX (YBCO) film through carbon mask is applied to fabricate a series of YBCO dc SQUIDs on SrTiO3 30°-bicrystal substrates. The width of Josephson junctions used in SQUIDs ranges from 0.6 μm to 1 μm. The character of the temperature dependence of the junctions critical current enables one to confirm the realization of d-wave pairing mechanism as well as the presence of localized states in the grain boundary region. The diffraction pattern of submicron junctions is discussed in relation to their further application in SQUIDs for task of scanning SQUID microscopy in high magnetic fields.
Keywords :
Josephson effect; SQUIDs; barium compounds; bicrystals; electron beam lithography; grain boundaries; high-temperature superconductors; sputter etching; superconducting thin films; yttrium compounds; C; DC SQUID; SrTiO3; SrTiO3 bicrystal substrate; YBCO thin film; YBa2Cu3O; carbon mask; critical current; d-wave pairing; diffraction pattern; electron beam lithography; grain boundary; high temperature superconductor; ion beam etching; localized states; magnetic field; scanning SQUID microscopy; submicron Josephson junction; temperature dependence; Critical current; Etching; Grain boundaries; Ion beams; Josephson junctions; Lithography; SQUIDs; Substrates; Temperature dependence; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2003.814068
