Title :
High quality YBa2Cu3O7-δ Josephson junctions and junction arrays fabricated by masked proton beam irradiation damage
Author :
Peng, Nianhua ; Kang, Dae Joon ; Jeynes, Chris ; Webb, Roger P. ; Moore, David F. ; Blamire, Mark G. ; Chakarov, Ivan R.
Author_Institution :
Surrey Centre for Res. in Ion Beam Applications, Univ. of Surrey, Guildford, UK
fDate :
6/1/2003 12:00:00 AM
Abstract :
High quality single Josephson junctions and junction arrays with 10 junctions in series have been fabricated using masked proton beam irradiation damage technology. Monte Carlo simulation of the irradiation damage profile underneath the metal mask has been carried out systematically to guide the metal mask structure design. A high resolution and high aspect ratio metal mask opening was fabricated by focused 30 keV Ga ion beam milling. Various nonconducting oxide buffer layers have been investigated for a Ga contamination free mask fabrication. A contamination free irradiation process and subsequent removal of metal mask after ion irradiation are the keys for the improved properties of junctions fabricated with YBCO.
Keywords :
Josephson effect; Monte Carlo methods; barium compounds; high-temperature superconductors; proton effects; superconducting arrays; superconducting junction devices; yttrium compounds; 30 keV; Josephson junction arrays; Josephson junctions; Monte Carlo simulation; YBa2Cu3O7-δ; aspect ratio; contamination free irradiation process; ion beam milling; masked proton beam irradiation damage; metal mask; nonconducting oxide buffer layers; resolution; structure design; Contamination; Electron beams; Fabrication; Gold; Ion beams; Josephson junctions; Niobium; Particle beams; Production; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2003.814070
