Title :
Polymer long-period raised rib waveguide gratings using nano-imprint lithography
Author :
Perentos, Andreas ; Kostovski, Gorgi ; Mitchell, Arnan
Author_Institution :
Microelectron. & Mater. Technol. Centre, RMIT Univ., Melbourne, Vic., Australia
Abstract :
This letter presents the fabrication and demonstration of a long-period raised rib waveguide grating using nano-imprint lithography. The device consists of a lower UV15 cladding, where relief-gratings are implemented, and an NOA73 raised rib core waveguide. Spectral transmission reveals a resonance at 1585 nm with about 10-dB rejection and 12-nm linewidth.
Keywords :
claddings; diffraction gratings; integrated optics; optical fabrication; optical polymers; optical waveguide components; rib waveguides; soft lithography; spectral line breadth; 1585 nm; UV15 cladding; grating fabrication; long-period gratings; nanoimprint lithography; polymer gratings; raised rib waveguide gratings; relief-gratings; spectral transmission; Gratings; Lithography; Optical device fabrication; Optical planar waveguides; Optical polymers; Optical resonators; Optical waveguides; Planar waveguides; Resonance; Silicon; Long-period waveguide gratings (LPWGs); nano-imprint lithography (NIL); optical polymers; optical waveguide filters; polydimethylsiloxane (PDMS); soft lithography;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2005.859130
