• DocumentCode
    1239532
  • Title

    Control of unwanted light in silicon waveguide circuits

  • Author

    Payne, F.P.

  • Author_Institution
    Dept. of Eng. Sci., Oxford Univ., UK
  • Volume
    17
  • Issue
    12
  • fYear
    2005
  • Firstpage
    2625
  • Lastpage
    2627
  • Abstract
    We describe the design and fabrication of a stray light attenuator for silicon waveguide circuits. Using the attenuator, we demonstrate the fabrication of multimode interference couplers with uniformity accurate to better than 0.05 dB.
  • Keywords
    integrated optics; optical control; optical couplers; optical design techniques; optical fabrication; optical waveguides; silicon; Si; attenuator design; attenuator fabrication; multimode interference couplers; silicon waveguide circuits; stray light attenuator; unwanted light control; Circuits; Interference; Lighting control; Optical attenuators; Optical device fabrication; Optical modulation; Optical waveguides; Semiconductor waveguides; Silicon; Stray light; Integrated optics; multimode interference (MMI) couplers; silicon photonics; stray light;
  • fLanguage
    English
  • Journal_Title
    Photonics Technology Letters, IEEE
  • Publisher
    ieee
  • ISSN
    1041-1135
  • Type

    jour

  • DOI
    10.1109/LPT.2005.859159
  • Filename
    1542170