Title :
Arrayed variable optical attenuator using retro-reflective MEMS mirrors
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore
Abstract :
New arrayed microelectromechanical systems (MEMS) variable optical attenuators (VOAs) based on planar retro-reflection attenuation configuration have been characterized in this letter. Experimental results show the insertion loss of less than 0.8 dB, and back-reflection loss of better than 50 dB and polarization-dependent loss of less than 0.3 dB over full span of attenuation range of 50 dB. This arrayed MEMS VOA device does not only provide excellent optical performance, but offers a feasible solution to make VOA devices of multiple channels with good manufacturability, scalability, and compact footprint.
Keywords :
micromechanical devices; micromirrors; optical arrays; optical attenuators; optical communication equipment; optical losses; reflectivity; wavelength division multiplexing; MEMS mirrors; arrayed variable optical attenuator; backreflection loss; insertion loss; microelectromechanical systems; multiple-channel VOA device; planar retroreflection attenuation; polarization-dependent loss; retroreflective mirrors; wavelength-division-multiplexing; Insertion loss; Manufacturing; Microelectromechanical systems; Micromechanical devices; Mirrors; Optical arrays; Optical attenuators; Optical devices; Optical losses; Optical polarization; Metropolitan area network (MAN); microelectromechanical systems (MEMS); retro-reflection; variable optical attenuators (VOA); wavelength-division multiplexing;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2005.859538
