Title :
Photonic integrated circuits by DUV-induced modification of polymers
Author :
Rabus, D.G. ; Henzi, P. ; Mohr, J.
Author_Institution :
Inst. for Microstruct. Technol., Forschungszentrum Karlsruhe GmbH, Germany
fDate :
3/1/2005 12:00:00 AM
Abstract :
The results achieved with polymer Y-splitters, codirectional couplers, and multimode interference couplers, realized by deep ultraviolet lithography are presented. The devices are designed and fabricated for the 1.55-μm wavelength region and have a waveguide loss of 1 dB/cm. The waveguide width is 7.5 μm. The fiber-chip coupling loss is 0.5 dB per facet. The polarization-dependent loss is <0.15 dB.
Keywords :
integrated optics; light interference; optical beam splitters; optical design techniques; optical directional couplers; optical fabrication; optical fibre couplers; optical fibre losses; optical fibre polarisation; optical polymers; optical waveguide theory; ultraviolet lithography; 1.55 mum; 7.5 mum; DUV-induced modification; codirectional couplers; deep ultraviolet lithography; device design; device fabrication; fiber-chip coupling loss; multimode interference couplers; photonic integrated circuits; polarization-dependent loss; polymer Y-splitters; polymers; waveguide loss; Couplers; Interference; Lithography; Optical device fabrication; Optical fiber polarization; Optical polymers; Optical sensors; Optical waveguides; Photonic integrated circuits; Refractive index; Coupler; Y-splitter; deep ultraviolet (DUV); multimode interference (MMI); polymer;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2004.840922
