Title :
Continuous tape coating by thermal evaporation
Author :
Nemetschek, R. ; Prusseit, W. ; Holzapfel, B. ; Eickemeyer, J. ; Miller, U. ; Maher, E.
Author_Institution :
THEVA Dunnschichttechnik GmbH, Ismaning, Germany
fDate :
6/1/2003 12:00:00 AM
Abstract :
Among the various coating techniques, thermal evaporation currently allows the highest YBCO volume deposition rates because of its large area capability. This "simultaneous large area deposition" capability translates into long tape lengths when the deposition area is densely filled up with metal tape. On short rolling-assisted biaxially textured substrate samples thermal evaporation has already established critical current densities in excess of 1 MA/cm2 at 77 K, with very promising performance in magnetic fields. Recently, the deposition technique has been scaled up using a multiturn tape winder giving a simultaneously coatable length of about 4 m of 1-cm-wide tape. The reel-to-reel tape deposition system is designed for long term continuous operation based on in-situ refillable evaporation sources and controlled using feedback from atomic absorption spectroscopy measurements in the vapor phase. Here, the authors present results on the first coated conductor tape continuously fabricated by this technique.
Keywords :
barium compounds; critical current density (superconductivity); high-temperature superconductors; superconducting tapes; superconducting thin films; vacuum deposited coatings; yttrium compounds; 1 cm; 4 m; 77 K; YBCO volume deposition rates; YBa2Cu3O7; atomic absorption spectroscopy; continuous tape coating; critical current densities; large area capability; long tape lengths; multiturn tape winder; reel-to-reel tape deposition system; refillable evaporation sources; short rolling-assisted biaxially textured substrate; simultaneous large area deposition; thermal evaporation; Absorption; Atomic layer deposition; Atomic measurements; Coatings; Control systems; Critical current density; Feedback; Magnetic fields; Spectroscopy; Yttrium barium copper oxide;
Journal_Title :
Applied Superconductivity, IEEE Transactions on
DOI :
10.1109/TASC.2003.811825