PLD of large area films onto substrate undergoing translational motion by mask method

The simple method of laser deposition of large area uniform-thickness films onto a moving ribbon of width up to 100 mm is proposed. The peculiarity of the method is the laser deposition of compound upon a substrate through a mask placed in immediate proximity of the substrate. Various configurations of mask slits that provide thickness uniformity of deposited films are considered. The precise sizes of slits in the masks are calculated using the data of an angular distribution of mass transfer of a deposited compound in a plasma plume. Given the advantage of laser deposition, the offered method should find practical uses, in particular, in the manufacture of superconducting ribbons.