DocumentCode
1243231
Title
Chip making to dye for
Author
Paulson, L.D.
Volume
36
Issue
7
fYear
2003
fDate
7/1/2003 12:00:00 AM
Firstpage
20
Abstract
A University of Washington researcher is using common food dyes to improve photolithography, the dominant semiconductor microfabrication technology. The microfluidic masks are made by filling transparent silicone channels with red dye, which blocks UV light, to create the desired patterns to be projected onto the photoresist.
Keywords
dyes; photoresists; semiconductor device manufacture; ultraviolet lithography; UV light; University of Washington; food dyes; microfluidic masks; photolithography; photoresist; red dye; semiconductor microfabrication technology; transparent silicone channels; Circuit testing; Costs; Embedded computing; Filling; Lithography; Microelectromechanical systems; Microfluidics; Prototypes; Resists; Semiconductor materials;
fLanguage
English
Journal_Title
Computer
Publisher
ieee
ISSN
0018-9162
Type
jour
DOI
10.1109/MC.2003.1212683
Filename
1212683
Link To Document