Temperature stability of ZnO thin film SAW device on fused quartz

Surface acoustic wave (SAW) filters for low-frequency (38-65 MHz) applications have been developed using a radio frequency (RF)-magnetron-sputtered ZnO film on fused-quartz substrates. SAW propagation characteristics such as electromechanical coupling coefficient (K²), SAW phase velocity (v), insertion loss, and temperature coefficient of delay (TCD) have been measured. The intergidital transducer (IDT)/ZnO/fused-quartz device structure yields almost zero TCD (1 ppm·°C^-1) with 0.316 λ thick ZnO layer (for the device operating at 60 MHz). Alternately, an overlayer of positive TCD material (ZnO itself) has also been deposited on the IDT/ZnO(<0.316 λ)/fused-quartz device at a low substrate temperature to reduce the TCD. A modified layered structure consisting of ZnO/IDT/ZnO/fused quartz yields almost zero TCD (-3 ppm·°C^-1) with a 5.3-μm-thick ZnO overlayer and a 8.1-μm-thick (0.183 λ) ZnO bottom layer. Experimentally obtained SAW propagation characteristics have been compared with the theoretical results.