Title :
An infrared-bi-color Schottky-barrier CCD image sensor for precise thermal images
Author :
Konuma, Kazuo ; Asano, Yoshitaka ; Masubuchi, Kouichi ; Utsumi, Hiroaki ; Tohyama, Shigeru ; Endo, Tsutomu ; Azuma, Hiromi ; Teranishi, Nobukazu
Author_Institution :
Sensor Res. Lab., NEC Corp., Kanagawa, Japan
fDate :
2/1/1996 12:00:00 AM
Abstract :
An infrared-bi-color image sensor was developed with a barrier height controlled Schottky-barrier photo diode array for precise temperature images. Low and high barrier height diode pixels are arranged vertically next to one another using a selective area ion implantation technique. Conventional monochrome infrared image sensors frequently give wrong temperature images due to an unreasonable emissivity assumption. The infrared-bi-color image sensor can obtain the temperature image precisely with regard to the emissivity of the object
Keywords :
CCD image sensors; Schottky diodes; infrared imaging; ion implantation; photodiodes; barrier height; emissivity; infrared-bi-color Schottky-barrier CCD image sensor; photodiode array; selective area ion implantation; temperature imaging; thermal imaging; Charge-coupled image sensors; Image sensors; Infrared image sensors; Ion implantation; Laboratories; Pixel; Schottky diodes; Sensor arrays; Temperature measurement; Temperature sensors;
Journal_Title :
Electron Devices, IEEE Transactions on
