The virtual IC factory ... can it be achieved?

Author

Law, Mark E.

Volume

11

Issue

2

fYear

1995

fDate

3/1/1995 12:00:00 AM

Firstpage

25

Lastpage

31

Abstract

Technology computer-aided design (TCAD) is the software tool set that allows integrated circuit (IC) technologists to develop new processes and devices without having to build costly test lots. TCAD can potentially provide process engineers the same benefits that electronic circuit CAD (ECAD) has provided to circuit designers. Circuit designers can design, lay out, and test new circuits without fabricating them, and still largely be assured that the circuit will work when manufactured. Will the day come when an engineer can use software to develop a new manufacturing process and predict its performance and yield accurately?

Keywords

digital simulation; integrated circuit yield; semiconductor process modelling; IC technology; TCAD; manufacturing process; process engineers; process performance; software tool set; technology computer-aided design; virtual IC factory; yield; Circuit testing; Design automation; Design engineering; Electronic circuits; Electronic design automation and methodology; Integrated circuit technology; Integrated circuit testing; Production facilities; Software testing; Software tools;

fLanguage

English

Journal_Title

Circuits and Devices Magazine, IEEE

Publisher

ieee

ISSN

8755-3996

Type

jour

DOI

10.1109/101.366092

Filename

366092